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Piezoelectrics & Acoustooptics, Volume. 46, Issue 4, 524(2024)

Verification of a Bend Testing Method for Thin-Film Materials

HUANG Xinlong1, LI Genzi2, ZHOU Longfei3, YANG Shaosong4, XIA Yan5, DONG Xianshan1, LAI Ping1, XIA Changfeng3, SONG Chenyang2, ZHANG Jinxi2, and HAN Jinzhe2
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  • 1[in Chinese]
  • 2[in Chinese]
  • 3[in Chinese]
  • 4[in Chinese]
  • 5[in Chinese]
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    [1] [1] WANG P,LU Q,FAN Z. Evolutionary design optimization of MEMS:a review of its history and state-ofthe-art[J].Cluster Computing,2019,22(Suppl.4):9105-9111.

    [7] [7] ZHANG W,HAO C,ZHANG Z,et al. Vector highresolution marine turbulence sensor based on a MEMS bionic cilium-shaped structure[J]. IEEE Sensors Journal,2021, 21(7): 8741-8750.

    [8] [8] WANG R, SHEN W, ZHANG W,et al. Design and implementation of a jellyfish otolith-inspired MEMS vector hydrophone for low-frequency detection[J]. Microsystems & Nanoengineering, 2021, 7(1): 1.

    [9] [9] DüRR O, FAN P Y, YIN Z X. Bayesian calibration of MEMS accelerometers[J]. IEEE Sensors Journal,2023, 23(12): 13319-13326.

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    HUANG Xinlong, LI Genzi, ZHOU Longfei, YANG Shaosong, XIA Yan, DONG Xianshan, LAI Ping, XIA Changfeng, SONG Chenyang, ZHANG Jinxi, HAN Jinzhe. Verification of a Bend Testing Method for Thin-Film Materials[J]. Piezoelectrics & Acoustooptics, 2024, 46(4): 524

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    Paper Information

    Received: Jun. 24, 2024

    Accepted: --

    Published Online: Sep. 18, 2024

    The Author Email:

    DOI:10.11977/j.issn.1004-2474.2024.04.018

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology