Fig. 1. Optical path diagram of DMD and equivalent mirror in convergent light path

Fig. 2. Optical path diagram of two working states for one DMD micromirror

Fig. 3. Relationship between optical path difference DOP caused by DMD and image height h on DMD

Fig. 4. Residual OPD curve after image plane tilt

Fig. 5. Schematic of experimental optical path of aberration verification for DMD under normal incidence. (a) Optical path diagram for mirror with deflection of 12°; (b) optical path diagram for DMD under normal incidence

Fig. 6. Experimental optical path of aberration verification for DMD under normal incidence. (a) Convergent imaging light path with mirror; (b) convergent imaging light path of DMD

Fig. 7. Experimental results of aberration verification for DMD under normal incidence. (a) Cross wires under plane mirror; (b) cross wires under DMD; (c) experimental result of OPD compensation by image plane tilt