Acta Optica Sinica, Volume. 42, Issue 9, 0912002(2022)
Scratch Evolution for Monocrystalline Silicon During Chemical-Mechanical Polishing
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Jingjing Xia, Jun Yu, Zhanshan Wang, Siwen Lu. Scratch Evolution for Monocrystalline Silicon During Chemical-Mechanical Polishing[J]. Acta Optica Sinica, 2022, 42(9): 0912002
Category: Instrumentation, Measurement and Metrology
Received: Sep. 26, 2021
Accepted: Nov. 22, 2021
Published Online: May. 6, 2022
The Author Email: Jun Yu (yujun_88831@tongji.edu.cn)