Researching | Theoretical study of the thickness uniformity of a coating on the inner face of a parabolic substrate in a vacuum evaporation system

Chinese Optics Letters, Volume. 13, Issue Suppl., S22201(2015)

Theoretical study of the thickness uniformity of a coating on the inner face of a parabolic substrate in a vacuum evaporation system

Lingmao Xu, Jizhou Wang^*, Maojin Dong, Duoshu Wang, and Yudong Feng

Author Affiliations

Science and Technology on Vacuum Technology and Physics Laboratory, Lanzhou Institute of Physics, Lanzhou 730001, China

show less

Full Text Get PDF

Figures&Tables (4)

References (12)

Paper Information

References(12)

[1] J. P. Li, M. Fang, H. B. He, J. D. Shao, Z. X. Fan, Z. Y. Li. Thin Solid Films, 526, 70(2012).

[2] M. Fang, Z. X. Fan, J. B. Huang. Chin. J. Comput. Phys., 6, 017(2006).

[3] D. L. Pan, S. M. Xiong, Y. D. Zhang. J. Appl. Opt., 1, 008(2001).

[4] F. Villa, A. Martinez, L. E. Regalado. Appl. Opt., 39, 1602(2000).

[5] G. I. Abzalova, R. S. Sabirov, A. V. Mikhailov. J. Opt. Technol., 72, 799(2005).

[6] C. Liu, C. Guo, M. Kong, B. Li. Chin. Opt. Lett., 11, S10213(2013).

[7] Y. L. Jin, Y. Qiu, H. Zhao, C. K. Zu. J. Vac. Sci. Technol., 4, 336(2014).

[8] W. Wu, J. Z. Wang, Y. Q. Xiong, D. S. Wang, Y. D. Feng. J. Vac. Sci. Technol., 4, 320(2014).

[9] L. Xu, J. Lv. J. Tianjin Technol., 15, 102(1999).

[10] M. Gross, S. Dligatch, A. Chtanov. Appl. Opt., 50, C316(2011).

[11] J. F. Tang. Modern Optical Thin Film Technology(2006).

[12] C. Guo, M. D. Kong, C. D. Liu, B. D. Li. Acta Opt. Sin., 02, 291(2013).

Tools

Get Citation

Copy Citation Text

Lingmao Xu, Jizhou Wang, Maojin Dong, Duoshu Wang, Yudong Feng, "Theoretical study of the thickness uniformity of a coating on the inner face of a parabolic substrate in a vacuum evaporation system," Chin. Opt. Lett. 13, S22201 (2015)

Download Citation

EndNote(RIS)BibTex Plain Text

Set citation alerts for article

Save article for my favorites

Paper Information

Category: Optical Design and Fabrication

Received: Apr. 29, 2015

Accepted: Jul. 9, 2015

Published Online: Aug. 8, 2018

The Author Email: Jizhou Wang (13919878241@139.com)

DOI:10.3788/COL201513.S22201

Topics

laser devices and laser physics

Lasers and Laser Optics

laser manufacturing

Instrumentation, Measurement and Metrology