Journal of Synthetic Crystals, Volume. 51, Issue 5, 865(2022)

Doping, Surface/Interface Regulation and Properties of Nanocrystalline Diamond Films

HU Xiaojun*, ZHENG Yuhao, CHEN Chengke, LU Shaohua, JIANG Meiyan, and LI Xiao
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  • [in Chinese]
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    In this paper, doping, electric conductivity, field emission and electrochemical properties of nanocrystalline diamond films are reviewed, which contain n-type nanocrystalline diamond (NCD) films prepared by chemical vapor deposition, improvement of n-type electrical conductivity in NCD films by ion implantation, excellent field emission properties of NCD films prepared by metal ion implantation, high mobility n-type conductivity obtained by low dose ion implantation and oxygen termination on grain surface, regulation of the structure of NCD/graphene and its influence on electrical and electrochemical properties, microstructure and electrochemical regulation of boron-doped NCD film electrodes and so on. It shows through comprehensive analysis that grain doping and surface/interface coordination can improve the electrical properties, field emission properties and electrochemical properties of thin films, which has important application prospects in the fields of diamond-based nano-electronic devices and electrochemical electrodes.

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    HU Xiaojun, ZHENG Yuhao, CHEN Chengke, LU Shaohua, JIANG Meiyan, LI Xiao. Doping, Surface/Interface Regulation and Properties of Nanocrystalline Diamond Films[J]. Journal of Synthetic Crystals, 2022, 51(5): 865

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    Paper Information

    Category:

    Received: Feb. 21, 2022

    Accepted: --

    Published Online: Jul. 7, 2022

    The Author Email: Xiaojun HU (huxj@zjut.edu.cn)

    DOI:

    CSTR:32186.14.

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