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Frontiers of Optoelectronics, Volume. 11, Issue 1, 53(2018)

Silicon waveguide cantilever displacement sensor for potential application for on-chip high speed AFM

Peng WANG*, Aron MICHAEL, and Chee Yee
Author Affiliations
  • School of Electrical Engineering and Telecommunications, University of New South Wales, Kensington, NSW 2052, Australia
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    Peng WANG, Aron MICHAEL, Chee Yee. Silicon waveguide cantilever displacement sensor for potential application for on-chip high speed AFM[J]. Frontiers of Optoelectronics, 2018, 11(1): 53

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    Paper Information

    Category: REVIEW ARTICLE

    Received: Nov. 29, 2017

    Accepted: Jan. 17, 2018

    Published Online: Aug. 4, 2018

    The Author Email: Peng WANG (peng.wang3@unsw.edu.au)

    DOI:10.1007/s12200-018-0774-4

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology