Acta Optica Sinica, Volume. 20, Issue 9, 1208(2000)

An Approximate Method for Calculating Thickness of Metal Multilayer Interface

[in Chinese], [in Chinese], [in Chinese], and [in Chinese]
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    References(3)

    [1] [1] Underwood J H,Barbee T W.Layered synthetic microstructure as Bragg diffractors for X-ray and extreme ultraviolet: Theory and predicted performance.Appl.Opt.,1981,20;17:3027~3034

    [2] [2] Heald S M,Chen H,Tranguada J M.Glancing-angle-extended X-ray-absorption fine structure and reflectivity studies of interfacial regions.Phys.Rew.;B,1988,38;2:1016~1025

    [3] [3] Voorma H J,Louis E,Koster N B et al..Characterization of multilayers by Fourier analysis of X-ray reflectivity.J.Appl.Phys.,1997,81;9:6112~6119

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    [in Chinese], [in Chinese], [in Chinese], [in Chinese]. An Approximate Method for Calculating Thickness of Metal Multilayer Interface[J]. Acta Optica Sinica, 2000, 20(9): 1208

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    Paper Information

    Category: Thin Films

    Received: Mar. 18, 1999

    Accepted: --

    Published Online: Aug. 9, 2006

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