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Acta Optica Sinica, Volume. 23, Issue 5, 547(2003)

Illumination System for Detecting Random Defects on Strongly Reflective and Complex Surfaces

[in Chinese]1、*, [in Chinese]1, [in Chinese]2, [in Chinese]1, and [in Chinese]1
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  • 2[in Chinese]
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    References(3)

    [1] [1] Wright P J, Rheinhorn S, Some D. Design and application of Gray Field/sup TM/ Technology for Defect Inspection Systems. Advanced Semiconductor Manufacturing Conference. 2001 IEEE/SEMI, 2001

    [2] [2] Badger J C, Enright S T. Automate surface inspection system. Iron and Steel Engng., 1996, (3):48～51

    [3] [3] Vascotto M. High speed surface defect identification on steel strip. Metallurgical Plant and Technology, 1996, (4):70～73

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    [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Illumination System for Detecting Random Defects on Strongly Reflective and Complex Surfaces[J]. Acta Optica Sinica, 2003, 23(5): 547

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    Paper Information

    Category: Fourier optics and signal processing

    Received: Apr. 1, 2002

    Accepted: --

    Published Online: Jun. 27, 2006

    The Author Email: (whby@eyou.com)

    DOI:

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology