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Piezoelectrics & Acoustooptics, Volume. 44, Issue 6, 896(2022)

Feedforward Control of Piezoelectric Micro-positioning Stage Based on Rate-dependent Hysteresis Model

WANG Bowen, CUI Yuguo, XIE Qifang, and CHEN Pan
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    WANG Bowen, CUI Yuguo, XIE Qifang, CHEN Pan. Feedforward Control of Piezoelectric Micro-positioning Stage Based on Rate-dependent Hysteresis Model[J]. Piezoelectrics & Acoustooptics, 2022, 44(6): 896

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    Paper Information

    Received: Apr. 1, 2022

    Accepted: --

    Published Online: Jan. 27, 2023

    The Author Email:

    DOI:10.11977/j.issn.1004-2474.2022.06.014

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology