Piezoelectrics & Acoustooptics, Volume. 44, Issue 6, 896(2022)

Feedforward Control of Piezoelectric Micro-positioning Stage Based on Rate-dependent Hysteresis Model

WANG Bowen... CUI Yuguo, XIE Qifang and CHEN Pan |Show fewer author(s)
Author Affiliations
  • [in Chinese]
  • show less

    In order to reduce the influence of the dynamic hysteresis characteristics of the piezoelectric micro-positioning stage on the positioning accuracy, a feedforward controller based on the rate-dependent inverse hysteresis model is designed to compensate the hysteresis. Firstly, the dynamic model of the stage is established on the basis of force analysis and motion analysis. Secondly, the Modified Prandtl-Ishilinskii(MPI) model is obtained by improving the classical Prandtl-Ishilinskii(PI) model, and the separated rate-dependent MPI model is obtained by connecting the MPI model in series with the linear dynamic model of the stage, and then the feedforward controller of the stage is established based on the rate-dependent MPI inverse model. Finally, the step response experiments and sinusoidal trajectory tracking experiments on the designed controller are carried out. The experimental results show that the designed controller has good positioning accuracy and tracking performance, and can effectively compensate the dynamic hysteresis errors of the piezoelectric micro-positioning stage.

    Tools

    Get Citation

    Copy Citation Text

    WANG Bowen, CUI Yuguo, XIE Qifang, CHEN Pan. Feedforward Control of Piezoelectric Micro-positioning Stage Based on Rate-dependent Hysteresis Model[J]. Piezoelectrics & Acoustooptics, 2022, 44(6): 896

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Received: Apr. 1, 2022

    Accepted: --

    Published Online: Jan. 27, 2023

    The Author Email:

    DOI:10.11977/j.issn.1004-2474.2022.06.014

    Topics