In order to reduce the influence of the dynamic hysteresis characteristics of the piezoelectric micro-positioning stage on the positioning accuracy, a feedforward controller based on the rate-dependent inverse hysteresis model is designed to compensate the hysteresis. Firstly, the dynamic model of the stage is established on the basis of force analysis and motion analysis. Secondly, the Modified Prandtl-Ishilinskii(MPI) model is obtained by improving the classical Prandtl-Ishilinskii(PI) model, and the separated rate-dependent MPI model is obtained by connecting the MPI model in series with the linear dynamic model of the stage, and then the feedforward controller of the stage is established based on the rate-dependent MPI inverse model. Finally, the step response experiments and sinusoidal trajectory tracking experiments on the designed controller are carried out. The experimental results show that the designed controller has good positioning accuracy and tracking performance, and can effectively compensate the dynamic hysteresis errors of the piezoelectric micro-positioning stage.