Chinese Optics Letters, Volume. 11, Issue 9, 090802(2013)
Glass homogeneity effect on wavefront aberration in lithography projection lens
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Hongbo Shang, Wei Huang, Chunlai Liu, Weicai Xu, Wang Yang, "Glass homogeneity effect on wavefront aberration in lithography projection lens," Chin. Opt. Lett. 11, 090802 (2013)
Paper Information
Category: Geometric Optics
Received: Apr. 29, 2013
Accepted: Aug. 2, 2013
Published Online: Sep. 3, 2013
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