Piezoelectrics & Acoustooptics, Volume. 47, Issue 1, 28(2025)

Design of a Low-Frequency High-Sensitivity Piezoelectric MEMS Acoustic Receiver

WANG Dengpan1,2,3, HUANG Jing1,2,3, ZHAO Defeng4, WANG Fei1,2,3, WANG Lu1,2,3, LIU Wenyi1,2,3, MIAO Jinwei1,2,3, ZHANG Liyu1,2,3, YUAN Yupeng1,2,3, and HU Yidong1,2,3
Author Affiliations
  • 1Academy of Chips Technology, China ElectronicsTechnology Group, Chongqing 401332, China
  • 2NIICAS (Chongqing)Technology Co., Ltd, Chongqing 401332, China
  • 3The 26th Institute of China Electronics Technology Group Corporation, Chongqing 400060, China
  • 4Yunnan Radio Co., Ltd., Kunming 650223, China
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    References(6)

    [1] [1] JIA Licheng, SHI Lei, LU Zhaoyang, et al. A high- performance 9.5% scandium-doped aluminum nitride piezoelectric MEMS hydrophone with honeycomb structure[J]. IEEE Electron Device Letters, 2021, 42(12): 1845-1848.

    [2] [2] DANGI A, CHENG C Y, AGRAWAL S, et al. A photoacoustic imaging device using piezoelectric micromachined ultrasound transducers(PMUTs)[J]. IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 2020, 67(4): 801-809.

    [8] [8] KUSANO Y, ISHII I, KAMIYA T, et al. High-SPL air-coupled piezoelectric micromachined ultrasonic transducers based on 36% ScAlN thin-film[J]. IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 2019,66(9): 1488-1496.

    [9] [9] MERTIN S, NYFFELER C, MAKKONEN T, et al. Non-destructive piezoelectric characterisation of Sc doped aluminium nitride thin films at wafer level[C]∥Glasgow, United Kingdom: 2019 IEEE International Ultrasonics Symposium(IUS), 2019: 2592-2595.

    [10] [10] UMEDA K, KAWAI H, HONDA A, et al. Piezoelectric properties of ScAlN thin films for piezo-MEMS devices[C]∥Taipei, China: 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems(MEMS), 2013: 733-736.

    [11] [11] TSENG S H, LO S C, CHEN Yuchen, et al. Implementation of piezoelectric MEMS microphone for sensitivity and sensing range enhancement[C]∥Vancouver, BC, Canada: 2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems(MEMS), 2020: 845-848.

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    WANG Dengpan, HUANG Jing, ZHAO Defeng, WANG Fei, WANG Lu, LIU Wenyi, MIAO Jinwei, ZHANG Liyu, YUAN Yupeng, HU Yidong. Design of a Low-Frequency High-Sensitivity Piezoelectric MEMS Acoustic Receiver[J]. Piezoelectrics & Acoustooptics, 2025, 47(1): 28

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    Paper Information

    Received: Oct. 27, 2024

    Accepted: Apr. 17, 2025

    Published Online: Apr. 17, 2025

    The Author Email:

    DOI:10.11977/j.issn.1004-2474.2025.01.004

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