Piezoelectrics & Acoustooptics, Volume. 47, Issue 1, 28(2025)
Design of a Low-Frequency High-Sensitivity Piezoelectric MEMS Acoustic Receiver
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WANG Dengpan, HUANG Jing, ZHAO Defeng, WANG Fei, WANG Lu, LIU Wenyi, MIAO Jinwei, ZHANG Liyu, YUAN Yupeng, HU Yidong. Design of a Low-Frequency High-Sensitivity Piezoelectric MEMS Acoustic Receiver[J]. Piezoelectrics & Acoustooptics, 2025, 47(1): 28
Received: Oct. 27, 2024
Accepted: Apr. 17, 2025
Published Online: Apr. 17, 2025
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