Piezoelectrics & Acoustooptics, Volume. 47, Issue 1, 28(2025)

Design of a Low-Frequency High-Sensitivity Piezoelectric MEMS Acoustic Receiver

WANG Dengpan1,2,3, HUANG Jing1,2,3, ZHAO Defeng4, WANG Fei1,2,3, WANG Lu1,2,3, LIU Wenyi1,2,3, MIAO Jinwei1,2,3, ZHANG Liyu1,2,3, YUAN Yupeng1,2,3, and HU Yidong1,2,3
Author Affiliations
  • 1Academy of Chips Technology, China ElectronicsTechnology Group, Chongqing 401332, China
  • 2NIICAS (Chongqing)Technology Co., Ltd, Chongqing 401332, China
  • 3The 26th Institute of China Electronics Technology Group Corporation, Chongqing 400060, China
  • 4Yunnan Radio Co., Ltd., Kunming 650223, China
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    To enhance the sensitivity in the low-frequency range, a slotted low-frequency high-sensitivity microelectromechanical systems (MEMS) acoustic sensor structure was designed based on scandium aluminum nitride (ScAlN) piezoelectric films. The influence of the number of slots on the resonant frequency and voltage output was analyzed. A MEMS acoustic receiver with a resonant frequency of 29.3 kHz was fabricated. The highest sensitivity measured within the frequency range of 20-30 kHz exceeded -60 dB, indicating that the slotted structure proposed in this paper could achieve high sensitivity in the low-frequency range.

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    WANG Dengpan, HUANG Jing, ZHAO Defeng, WANG Fei, WANG Lu, LIU Wenyi, MIAO Jinwei, ZHANG Liyu, YUAN Yupeng, HU Yidong. Design of a Low-Frequency High-Sensitivity Piezoelectric MEMS Acoustic Receiver[J]. Piezoelectrics & Acoustooptics, 2025, 47(1): 28

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    Paper Information

    Received: Oct. 27, 2024

    Accepted: Apr. 17, 2025

    Published Online: Apr. 17, 2025

    The Author Email:

    DOI:10.11977/j.issn.1004-2474.2025.01.004

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