Piezoelectrics & Acoustooptics, Volume. 47, Issue 1, 28(2025)
Design of a Low-Frequency High-Sensitivity Piezoelectric MEMS Acoustic Receiver
To enhance the sensitivity in the low-frequency range, a slotted low-frequency high-sensitivity microelectromechanical systems (MEMS) acoustic sensor structure was designed based on scandium aluminum nitride (ScAlN) piezoelectric films. The influence of the number of slots on the resonant frequency and voltage output was analyzed. A MEMS acoustic receiver with a resonant frequency of 29.3 kHz was fabricated. The highest sensitivity measured within the frequency range of 20-30 kHz exceeded -60 dB, indicating that the slotted structure proposed in this paper could achieve high sensitivity in the low-frequency range.
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WANG Dengpan, HUANG Jing, ZHAO Defeng, WANG Fei, WANG Lu, LIU Wenyi, MIAO Jinwei, ZHANG Liyu, YUAN Yupeng, HU Yidong. Design of a Low-Frequency High-Sensitivity Piezoelectric MEMS Acoustic Receiver[J]. Piezoelectrics & Acoustooptics, 2025, 47(1): 28
Received: Oct. 27, 2024
Accepted: Apr. 17, 2025
Published Online: Apr. 17, 2025
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