High Power Laser and Particle Beams, Volume. 37, Issue 1, 011004(2025)

Research progress of femtosecond laser precision machining technology for precision experiment

Xu He1, Yuncan Ma1、*, Xiao Ma1, Zhurong Cao2, Yin Yu1, Ying Yin3, Jing Li1, Jing Yang1, Limin Meng1, Jun Li1, Tianjiong Tao1, Hao Yang4, and Jun Jiang4
Author Affiliations
  • 1Institute of Fluid Physics, CAEP, Mianyang 621900, China
  • 2Laser Fusion Research Center, CAEP, Mianyang 621900, China
  • 3Institute of Chemical Materials, CAEP, Mianyang 621900, China
  • 4Institute of Electronic Engineering, CAEP, Mianyang 621900, China
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    Figures & Tables(8)
    Qualitative comparison between femtosecond laser processing technology and common processing technology
    Schematic diagram and control software of high repetition rate femtosecond laser processing technology platform[17]
    Typical metal foils and structures processed by high repetition rate femtosecond laser
    Schematic diagram and explosive crystal sample of precision diagnosis experiment for dynamic evolution of explosive material "hole"
    Geometric structure diagram, scanning path, image and SEM images of superhard composite refractive lens processed by high repetition rate femtosecond laser[22,41]
    Application scenario, structure and chemical selective etching effect of tantalum groove bracket processed by high repetition rate femtosecond laser
    Geometric design and core structure of terahertz filter processed by high repetition rate femtosecond laser and test results of filtering performance[45]
    • Table 1. Geometric structural parameters of parabolic column hole SiC CRL and diamond CRL

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      Table 1. Geometric structural parameters of parabolic column hole SiC CRL and diamond CRL

      opening diameterD/μmvertex intervald/μmlength of lens unit l/μmradius of curvature at vertex R/μmnumber of lens units Nrefractive index phase factor δ@E=12 keVfocal length f/m
      diamond CRL5005090073.595.07×10−60.807
      SiC CRL5005090073.594.66×10−60.876
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    Xu He, Yuncan Ma, Xiao Ma, Zhurong Cao, Yin Yu, Ying Yin, Jing Li, Jing Yang, Limin Meng, Jun Li, Tianjiong Tao, Hao Yang, Jun Jiang. Research progress of femtosecond laser precision machining technology for precision experiment[J]. High Power Laser and Particle Beams, 2025, 37(1): 011004

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    Paper Information

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    Received: Sep. 4, 2024

    Accepted: Dec. 12, 2024

    Published Online: Feb. 21, 2025

    The Author Email: Yuncan Ma (mayuncan@caep.cn)

    DOI:10.11884/HPLPB202537.240304

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