Femtosecond laser precision machining technology has three characteristics: extremely short duration time to avoid or alleviate thermal effects, extremely high peak power density suitable for any solid material and extremely small focal spot size to achieve precise removal or modification of micro areas, meeting the safety and precision machining needs of various difficult to machine and special materials involved in precision diagnosis/measurement experiments. The application of high stability and high repetition rate femtosecond lasers fills in the gap of low repetition rate femtosecond lasers that cannot achieve high-speed scanning, providing an important energy source for efficient and precise processing of various precision samples/specimens required for precision diagnosis/measurement experiments. This article takes the precision diagnosis/measurement experiments of various institutes of China Academy of Engineering Physics as the starting point for safe, efficient and precise processing requirements of precision samples/specimens. Taking typical application scenarios such as laser X-ray precision target materials and structures, explosive material microstructures, superhard material composite refractive lens structures, micro probe fiber precision fixed structures, and terahertz filter core structures as examples, it introduces the research progress of high-frequency femtosecond laser precision processing technology in the safe, efficient and precise processing of difficult to-machine materials and special materials.