Journal of Infrared and Millimeter Waves, Volume. 40, Issue 2, 172(2021)

High gain and low dark current AlInAsSb avalanche photodiodes grown by quaternary digital alloys

Da-Nong ZHENG1,2, Xiang-Bin SU1,2、*, Ying-Qiang XU1,2, and Zhi-Chuan NIU1,2
Author Affiliations
  • 1State Key Laboratory for Superlattices and Microstructures,Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China
  • 2College of Materials Science and Opto-Electronic Technology,University of Chinese Academy of Sciences,Beijing 101408,China
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    avalanche photodiodes (APD) have been fabricated using high quality GaSb-based AlInAsSb quaternary digital alloy grown by molecular beam epitaxy (MBE). To overcome the tendency towards phase segregation of random alloy, a digital alloy technique with migration-enhanced epitaxy growth method was employed, using a shutter sequence of AlSb, AlAs, AlSb, Sb, In, InAs, In, Sb. The HRXRD curve shows sharp satellite peaks and almost perfect lattice matching. The smooth surface morphology can also be observed on the AFM image. Using optimized digital alloy, AlInAsSb separate absorption, grading, charge, and multiplication (SAGCM) APD was grown and fabricated. At room temperature, the device showed high performance with low dark current density of 0.95 mA/cm2 at 95% breakdown and maximum stable gain before breakdown as high as 100, showing the potential for further applications of optoelectronics.

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    Da-Nong ZHENG, Xiang-Bin SU, Ying-Qiang XU, Zhi-Chuan NIU. High gain and low dark current AlInAsSb avalanche photodiodes grown by quaternary digital alloys[J]. Journal of Infrared and Millimeter Waves, 2021, 40(2): 172

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    Paper Information

    Category: Research Articles

    Received: Jun. 12, 2020

    Accepted: --

    Published Online: Aug. 31, 2021

    The Author Email: Xiang-Bin SU (suxb@semi.ac.cn)

    DOI:10.11972/j.issn.1001-9014.2021.02.006

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