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Acta Optica Sinica, Volume. 33, Issue 9, 922001(2013)

Analysis of Mid-Spatial Frequency Surface Errors Effects on Local Flare in Lithographic Projection Lens

Yang Wang1,2、*, Huang Wei1, Xu Weicai1, and Shang Hongbo1
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    Article index updated: Mar. 10, 2025

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    Yang Wang, Huang Wei, Xu Weicai, Shang Hongbo. Analysis of Mid-Spatial Frequency Surface Errors Effects on Local Flare in Lithographic Projection Lens[J]. Acta Optica Sinica, 2013, 33(9): 922001

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    Paper Information

    Category: Optical Design and Fabrication

    Received: Dec. 12, 2012

    Accepted: --

    Published Online: Aug. 8, 2013

    The Author Email: Wang Yang (yangwang@ciomp.ac.cn)

    DOI:10.3788/aos201333.0922001

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology