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Chinese Optics, Volume. 13, Issue 1, 189(2020)

Grating-based precision measurement system for five-dimensional measurement

LV Qiang1,2, WANG Wei1, LIU Zhao-wu1, SONG Ying1, JIANG Shan1, LIU Lin1,2, BAYANHESHIG1, and LI Wen-hao1
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    LV Qiang, WANG Wei, LIU Zhao-wu, SONG Ying, JIANG Shan, LIU Lin, BAYANHESHIG, LI Wen-hao. Grating-based precision measurement system for five-dimensional measurement[J]. Chinese Optics, 2020, 13(1): 189

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    Received: Mar. 5, 2019

    Accepted: --

    Published Online: Mar. 9, 2020

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    DOI:10.3788/co.20201301.0189

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