Researching | Novel homodyne frequency-shifting interference pattern locking system

Chinese Optics Letters, Volume. 14, Issue 6, 061201(2016)

Novel homodyne frequency-shifting interference pattern locking system

Yu Zhu, Leijie Wang, Ming Zhang^*, Sen Lu, Kaiming Yang, and Chuxiong Hu

Author Affiliations

State Key Laboratory of Tribology, Department of Mechanical Engineering, Tsinghua University, Beijing 100084, China

show less

Full Text Get PDF

Figures&Tables (7)

References (10)

Paper Information

References(10)

[1] M. Schatternburg, C. Chen, P. Everett, J. Ferrera, P. Konkola, H. Smith. J. Vac. Sci. Technol. B, 17, 2692(1999).

[2] R. Heilmann, P. Konkola, C. Chen, G. Pati, M. Schatternburg. J. Vac. Sci. Technol. B, 19, 2342(2001).

[3] F. Zhu, J. Ma, W. Huang, J. Wang, C. Zhou. Chin. Opt. Lett., 12, 080501(2014).

[4] B. Yu, W. Jia, C. Zhou, H. Cao, W. Sun. Chin. Opt. Lett., 11, 080501(2013).

[5] L. Zeng, L. Li. Opt. Lett., 32, 1081(2007).

[6] D. Ma, L. Zeng. Opt. Lett., 40, 1346(2015).

[7] P. Young, P. Priambodo, T. Maldonado. Appl. Opt, 45, 4563(2006).

[8] A. Fitzgibbon, M. Pilu, R. Fisher. IEEE Trans. Pattern Anal. Mach. Intell., 21, 476(1999).

[9] K. Birch, M. Downs. Metrologia, 31, 315(1994).

[10] F. Jong, B. Pasch, T. Castenmiller, B. Vleeming, R. Droste, F. Mast. Proc. SPIE, 7274, 727411(2009).

CLP Journals

[1] Lieshan Zhang, Xiaolin Zhang, Wenyan Tang, "Detection of water surface capillary wave by analysis of turning-point local signal data using a laser interferometer," Chin. Opt. Lett. 15, 071201 (2017)

Cited By

[1] Yi Song, Chengqun Gui, Zongliang Huo, S. W. Ricky Lee, Sheng Liu. Mechanical system and dynamic control in photolithography for nanoscale fabrication: A critical review. International Journal of Mechanical System Dynamics, 1, 35(2021).

Tools

Get Citation

Copy Citation Text

Yu Zhu, Leijie Wang, Ming Zhang, Sen Lu, Kaiming Yang, Chuxiong Hu, "Novel homodyne frequency-shifting interference pattern locking system," Chin. Opt. Lett. 14, 061201 (2016)

Download Citation

EndNote(RIS)BibTex Plain Text

Set citation alerts for article

Save article for my favorites

Paper Information

Category: Instrumentation, measurement, and metrology

Received: Jan. 21, 2016

Accepted: Mar. 11, 2016

Published Online: Aug. 3, 2018

The Author Email: Ming Zhang (zm01@mails.tsinghua.edu.cn)

DOI:10.3788/COL201614.061201

Topics

laser devices and laser physics

Lasers and Laser Optics

laser manufacturing

Instrumentation, Measurement and Metrology