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Piezoelectrics & Acoustooptics, Volume. 42, Issue 3, 317(2020)

Research on Precision Positioning Stage Based on Dual Piezoceramics Driving Principle

HU Zhiping1, GU Sen1, TANG Feiyang1, SUN Haonan1, ZHU Junhui2, WANG Yong2, and RU Changhai1,2,3、*
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    HU Zhiping, GU Sen, TANG Feiyang, SUN Haonan, ZHU Junhui, WANG Yong, RU Changhai. Research on Precision Positioning Stage Based on Dual Piezoceramics Driving Principle[J]. Piezoelectrics & Acoustooptics, 2020, 42(3): 317

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    Paper Information

    Received: Oct. 29, 2019

    Accepted: --

    Published Online: Apr. 21, 2022

    The Author Email: RU Changhai (rchhai@gmail.com)

    DOI:10.11977/j.issn.1004-2474.2020.03.008

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology