Acta Optica Sinica, Volume. 43, Issue 16, 1623013(2023)

Advancements in Micro-Nano Optical Device Based on Two-Photon Direct Writing

Minfei He1, Dazhao Zhu2, Hongqing Wang2, Zhenyu Yang1, Fanqi Shen1, Rengmao Wu1, Cuifang Kuang1,2, and Xu Liu1,2、*
Author Affiliations
  • 1State Key Laboratory of Extreme Photonics and Instrumentation, Zhejiang University, Hangzhou 310027, Zhejiang, China
  • 2Zhejiang Laboratory, Hangzhou 311121, Zhejiang, China
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    Figures & Tables(13)
    Principle of direct laser writing (DLW) technology based on two photon polymerization
    Results obtained from the writing and characterization process of a DOE lens array[42]. (a) Parameters used for writing the structure; (b) an optical microscope image of the resulting written structure array; (c) an SEM image of an individual structure in Fig. 2(b); (d) normalized light intensity distribution at the focal plane as simulated for the proposed structure; (e) simulated intensity distribution curve and (f) experimentally measured intensity distribution curve in the light intensity distribution plot, full width at half maximum for the two curves is approximately 0.49 μm and 0.47 μm, respectively
    Achromatic diffractive lens. (a) Optical microscopy image; (b) normalized light intensity distribution at the focal plane as simulated for the achromatic focusing; (c) SEM image of the segmented structure; (d) enlarged profile
    A freeform lens structure on the end face of an optical fiber. (a)-(c) Optical images of integrated freeform lens on the optical fiber; (d) experimental result of beam shaping
    Vortex phase plate structure on the end face of an optical fiber. (a) (b) SEM images of vortex phase plate structure on the optical fiber; (c) intensity distribution of fiber output beam after vortex phase modulation in the experiment
    Schematic of super-resolution DLW system based on single-color PPI
    Design, fabrication, and characterization of spin-decoupled metasurface[26]. (a) Schematic of spin-decoupled metasurface, and different spins are transformed into two separated foci; (b) nanorod orientation profile of the spin-decoupled metasurface; (c)-(e) SEM images of the metasurface fabricated by single-color PPI, with magnified views; (f) simulated and measured focusing patterns for LCP and RCP incident light; (g) simulated and measured intensity profiles for LCP and RCP incident light
    Comparison of the metasurfaces with the inhibition beam on and with the inhibition beam off[26]. (a) With inhibition beam on; (b) with the inhibition beam off
    3D subwavelength structured photonic crystals fabricated by single-color PPI super-resolution DLW lithography[26]. (a) Schematic of 3D woodpile photonic crystal structure with a lateral period of a and an axial period of 2a; (b) (c) SEM images of the photonic crystal structure fabricated by single-color PPI super-resolution DLW technique with a feature size of 58 nm and lateral period of a=250 nm; (d) optical microscope image of woodpile photonic crystal under white light illumination
    System and applications of parallel peripheral-photoinhibition lithography (P3L) [27]. (a) Schematic of P3L system; (b) focal spot intensity distribution on x-y and y-z planes, dual-channel PPI direct writing achieved through 532 nm dual-beams and 780 nm dual-beams; microlens arrays with dual-focal distances of (c) 18 μm and (d) 50 μm; (e) photonic wire bonds
    Large-scale structures fabricated by multi-channel high-speed DLW. (a) Grating structure of 25 mm×25 mm; (b) SEM image of the grating structure; (c) iconic building of Zhejiang Lab and the slogan "Dedication to Science and National Prosperity"; (d) Fresnel lens with a diameter of 15 mm
    • Table 1. Comparison of fabrication methods and printed size of woodpile photonic crystals

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      Table 1. Comparison of fabrication methods and printed size of woodpile photonic crystals

      Lateral period a /nmWidth w /nmFabrication methodRef.
      1500750Interference lithography76
      1000296Two-photon DLW78
      650190Two-photon DLW79
      476171Two-photon DLW77
      310103Two-color PPI-DLW81
      300110Two step absorption DLW75
      28098DLW+heat-shrinking method21
      275-Two-color PPI-DLW80
      25075E-beam lithograohy+deposition+etching74
      25058Single-color PPI-DLW26](our work)
    • Table 2. Comparison of printing speed, feature size, and number of channels for two-photon direct writing under various scanning mechanisms

      View table

      Table 2. Comparison of printing speed, feature size, and number of channels for two-photon direct writing under various scanning mechanisms

      Printing speed /(mm·s-1Minimum feature size /μmNumber of channelsScanning mechanismRef.
      4000.59Galvo mirror90
      0.10.129Galvo mirror91
      50.54Digital micromirror device87
      820011Resonant-galvo mirror92
      77700.156Polygon laser scanner28](our work)
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    Minfei He, Dazhao Zhu, Hongqing Wang, Zhenyu Yang, Fanqi Shen, Rengmao Wu, Cuifang Kuang, Xu Liu. Advancements in Micro-Nano Optical Device Based on Two-Photon Direct Writing[J]. Acta Optica Sinica, 2023, 43(16): 1623013

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    Paper Information

    Category: Optical Devices

    Received: May. 24, 2023

    Accepted: Jun. 30, 2023

    Published Online: Aug. 1, 2023

    The Author Email: Liu Xu (liuxu@zju.edu.cn)

    DOI:10.3788/AOS231039

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