Preparation of Anti-Reflection Coatings on Quartz Tube Surfaces Based on Atomic Layer Deposition

Wen Mu; Weidong Shen; Chenying Yang; Xiaowen Zheng; Zhen Wang; Huaxin Yuan; Wenjia Yuan; Yueguang Zhang

doi:10.3788/AOS201939.0324001

Acta Optica Sinica, Volume. 39, Issue 3, 0324001(2019)

Preparation of Anti-Reflection Coatings on Quartz Tube Surfaces Based on Atomic Layer Deposition

Wen Mu, Weidong Shen^*, Chenying Yang, Xiaowen Zheng, Zhen Wang, Huaxin Yuan, Wenjia Yuan, and Yueguang Zhang

State Key Laboratory of Modern Optical Instrumentation, College of Optical Science and Engineering, Zhejiang University, Hangzhou, Zhejiang 310027, China

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Wen Mu, Weidong Shen, Chenying Yang, Xiaowen Zheng, Zhen Wang, Huaxin Yuan, Wenjia Yuan, Yueguang Zhang. Preparation of Anti-Reflection Coatings on Quartz Tube Surfaces Based on Atomic Layer Deposition[J]. Acta Optica Sinica, 2019, 39(3): 0324001

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Paper Information

Category: Optics at Surfaces

Received: Sep. 25, 2018

Accepted: Oct. 30, 2018

Published Online: May. 10, 2019

The Author Email:

DOI:10.3788/AOS201939.0324001

Topics

laser devices and laser physics

Lasers and Laser Optics

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laser manufacturing

Instrumentation, Measurement and Metrology