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Chinese Journal of Lasers, Volume. 38, Issue 2, 203002(2011)

Research on Infrared Laser Scribing Technology of Single Mesa Diode Wafer

Wang Zhong1,2、*, He Li2, Xie Yunhui1, Tan Bo1, and Lu Feixing2
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    Wang Zhong, He Li, Xie Yunhui, Tan Bo, Lu Feixing. Research on Infrared Laser Scribing Technology of Single Mesa Diode Wafer[J]. Chinese Journal of Lasers, 2011, 38(2): 203002

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    Paper Information

    Category: laser manufacturing

    Received: Aug. 4, 2010

    Accepted: --

    Published Online: Jan. 17, 2011

    The Author Email: Zhong Wang (wzhong@public.wh.hb.cn)

    DOI:10.3788/cjl201138.0203002

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology