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Piezoelectrics & Acoustooptics, Volume. 46, Issue 1, 11(2024)

Design and Preparation of Thin Film Bulk Acoustic Resonators with Edge Air Layers

ZHU Yuhan1, DUAN Lanyan2, CHEN Zhipeng1, XU Kaibin1, HU Han1, YI Xinyan3, and LI Guoqiang1,3
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  • 1[in Chinese]
  • 2[in Chinese]
  • 3[in Chinese]
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    ZHU Yuhan, DUAN Lanyan, CHEN Zhipeng, XU Kaibin, HU Han, YI Xinyan, LI Guoqiang. Design and Preparation of Thin Film Bulk Acoustic Resonators with Edge Air Layers[J]. Piezoelectrics & Acoustooptics, 2024, 46(1): 11

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    Paper Information

    Received: Sep. 18, 2023

    Accepted: --

    Published Online: Jul. 18, 2024

    The Author Email:

    DOI:10.11977/j.issn.1004-2474.2024.01.003

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology