Piezoelectrics & Acoustooptics, Volume. 46, Issue 1, 11(2024)

Design and Preparation of Thin Film Bulk Acoustic Resonators with Edge Air Layers

ZHU Yuhan1, DUAN Lanyan2, CHEN Zhipeng1, XU Kaibin1, HU Han1, YI Xinyan3, and LI Guoqiang1,3
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
  • 3[in Chinese]
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    The piezoelectric film has an inherent nonlinear hysteresis response to the piezoelectric effect, and the sound wave has a shear wave component that propagates toward the edge, both of which will cause energy loss of the sound wave. In this paper, a single-crystalline aluminum nitride thin film bulk acoustic wave resonator (SABAR) with an edge air layer structure is designed, which can reduce the electromechanical loss of nonlinear hysteresis, prevent the leakage of shear wave energy, and improve the quality factor of the resonator. COMSOL is used to conduct finite element simulation of the device, and a resonator with an edge air layer structure was successfully prepared for testing and verification.

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    ZHU Yuhan, DUAN Lanyan, CHEN Zhipeng, XU Kaibin, HU Han, YI Xinyan, LI Guoqiang. Design and Preparation of Thin Film Bulk Acoustic Resonators with Edge Air Layers[J]. Piezoelectrics & Acoustooptics, 2024, 46(1): 11

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    Paper Information

    Received: Sep. 18, 2023

    Accepted: --

    Published Online: Jul. 18, 2024

    The Author Email:

    DOI:10.11977/j.issn.1004-2474.2024.01.003

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