Laser & Optoelectronics Progress, Volume. 49, Issue 2, 23101(2012)

Merit Function Correction Technology of Thin-Film Thickness Wideband Monitoring System

Shang Xiaoyan1、*, Han Jun1, and Jiang Xu2
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    Shang Xiaoyan, Han Jun, Jiang Xu. Merit Function Correction Technology of Thin-Film Thickness Wideband Monitoring System[J]. Laser & Optoelectronics Progress, 2012, 49(2): 23101

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    Paper Information

    Category: Thin Films

    Received: Aug. 8, 2011

    Accepted: --

    Published Online: Dec. 23, 2011

    The Author Email: Xiaoyan Shang (shaxiayan@126.com)

    DOI:10.3788/lop49.023101

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