Laser & Optoelectronics Progress, Volume. 49, Issue 2, 23101(2012)
Merit Function Correction Technology of Thin-Film Thickness Wideband Monitoring System
Get Citation
Copy Citation Text
Shang Xiaoyan, Han Jun, Jiang Xu. Merit Function Correction Technology of Thin-Film Thickness Wideband Monitoring System[J]. Laser & Optoelectronics Progress, 2012, 49(2): 23101
Category: Thin Films
Received: Aug. 8, 2011
Accepted: --
Published Online: Dec. 23, 2011
The Author Email: Xiaoyan Shang (shaxiayan@126.com)