Fig. 1. Optical path principle of micro region stress measurement based on polarization camera

Fig. 2. Relationship between polarizer extinction ratio and relative error

Fig. 3. Relative error of measurement results caused by 1/4 wave plate phase deviation

Fig. 4. Micro region stress measurement device diagram

Fig. 5. Resolving power test target

Fig. 6. Resolution test result

Fig. 7. Test results of cavity self inspection method. (a) Cavity phase delay distribution; (b) horizontal measurement results

Fig. 8. 1/4 wave plate phase delay distribution. (a) Direct measurement of 1/4 wave plate; (b) corrected phase delay distribution

Fig. 9. Measurement results. (a) Vertical measurement results; (b) horizontal measurement results

Fig. 10. Sample holding device. (a) Force direction; (b) different measuring areas

Fig. 11. Force analysis of different measurement areas. (a) Area 1; (b) area 2; (c) area 3; (d) area 4

Fig. 12. Phase delay distribution in different measurement areas.(a) Area 1; (b) area 2; (c) area 3; (d) area 4