Fig. 1. VIBE polishing

Fig. 2. Generalized Maxwell model

Fig. 3. Schematic diagram of conformal vibration polishing

Fig. 4. Schematic diagram of mesoscopic compression

Fig. 5. Finite element simulation stress cloud map

Fig. 6. Influence curves of elastic modulus and polishing pressure. (a) Mid-spatial frequency removal ability; (b) low-spatial frequency shape preservation ability

Fig. 7. Influence curves of vibration frequency and elastic modulus. (a) Mid-spatial frequency removal ability; (b) low-spatial frequency shape preservation ability

Fig. 8. Influence curves of polishing pressure and vibration frequency. (a) Mid-spatial frequency removal ability; (b) low-spatial frequency shape preservation ability

Fig. 9. Conformal vibration experimental platform. (a) Conformal vibration polishing platform; (b) experimental process

Fig. 10. Initial surface shape

Fig. 11. Experimental results. (a) Remove surface; (b) smooth surface process

Fig. 12. Evolution of mid-spatial frequency errors

Fig. 13. PSD analysis. (a) First and second group; (b) third and fourth group