Acta Optica Sinica, Volume. 30, Issue 5, 1455(2010)
MEMS Infrared Emitter Based on SOI Wafer
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Qian Kun, Li Fangqiang, Cheng Meiying, San Haisheng, Chen Xuyuan. MEMS Infrared Emitter Based on SOI Wafer[J]. Acta Optica Sinica, 2010, 30(5): 1455
Paper Information
Category: Optical Design and Fabrication
Received: Apr. 16, 2009
Accepted: --
Published Online: May. 11, 2010
The Author Email: Kun Qian (Q.kun1005@gmail.com)
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