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Acta Optica Sinica, Volume. 35, Issue 3, 331001(2015)

Preparation and Characteristic of Oxide Capping-Layer on Extreme Ultraviolet Reflective Mirrors

Wang Xun1,2、*, Jin Chunshui1, Li Chun1, and Kuang Shangqi1
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  • 1[in Chinese]
  • 2[in Chinese]
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    Wang Xun, Jin Chunshui, Li Chun, Kuang Shangqi. Preparation and Characteristic of Oxide Capping-Layer on Extreme Ultraviolet Reflective Mirrors[J]. Acta Optica Sinica, 2015, 35(3): 331001

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    Paper Information

    Category: Thin Films

    Received: Oct. 15, 2014

    Accepted: --

    Published Online: Feb. 4, 2015

    The Author Email: Xun Wang (xunwang1211@gmail.com)

    DOI:10.3788/aos201535.0331001

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology