Nanoscale-resolved patterning on metal hydrazone complex thin films using diode-based maskless laser writing in the visible light regime

Kui Zhang; Zhimin Chen; Yongyou Geng; Yang Wang; Yiqun Wu

doi:10.3788/COL201614.051401

Chinese Optics Letters, Volume. 14, Issue 5, 051401(2016)

Nanoscale-resolved patterning on metal hydrazone complex thin films using diode-based maskless laser writing in the visible light regime

Kui Zhang^1,3, Zhimin Chen², Yongyou Geng¹, Yang Wang¹, and Yiqun Wu^1,2、*

Author Affiliations

¹Laboratory for High Density Optical Storage of the Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China

²Key Laboratory of Functional Inorganic Material Chemistry (Heilongjiang University), Ministry of Education, Harbin 150080, China

³University of Chinese Academy of Sciences, Beijing 100049, China

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Cited By

[1] Jingsong Wei. Laser Heat-Mode Lithography, 291, 123(2019).

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Kui Zhang, Zhimin Chen, Yongyou Geng, Yang Wang, Yiqun Wu, "Nanoscale-resolved patterning on metal hydrazone complex thin films using diode-based maskless laser writing in the visible light regime," Chin. Opt. Lett. 14, 051401 (2016)

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Paper Information

Category: Lasers and Laser Optics

Received: Nov. 28, 2015

Accepted: Mar. 4, 2016

Published Online: Aug. 6, 2018

The Author Email: Yiqun Wu (yqwu@siom.ac.cn)

DOI:10.3788/COL201614.051401

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology