[1] [1] M C Huntley. Diffraction Gratings[M]. London: Academic Press,1982.

[2] [2] Bayanheshig. The Study on the Dispersion Theory, Design, Manufacture, and Efficiency test of Diffraction Gratings[D]. Beijing: Graduate University of Chinese Academy of Sciences, 2004.

[3] [3] Yang Zengpeng, Tang Yuguo, Bayanheshig, et al.. Optimization design method for optical system of prism-grating ultraspectral imaging spectrometers[J]. Acta Optica Sinica, 2014, 34(9): 0911003.

[4] [4] Yang Chao, Yu Haili, Mi Xiaotao, et al.. Development of the workbench yaw angle correction mechanism of large grating ruling machine[J]. Chinese Journal of Scientific Instrument, 2014, 35(5): 1065-1071.

[5] [5] Liang Haoming. The grating ruling engine of U.S. kitt peak observatory[J]. Optics and Precision Engineering, 1984, 4: 22-31.

[6] [6] T Kita, T Harada. Ruling engine using a piezoelectric device for large and high-groove density gratings[J]. Appl Opt, 1992, 31(10): 1399-1406.

[7] [7] Li Zhilai. Analysis and research on performance of enclosed high accuracy air guideway with an unit compensating airspace error[J]. Journal of Changchun Institute of Optics and Fine Mechanics, 1996, 19(4): 41-45.

[8] [8] Li Xiaotian, Bayanheshig, Qi Xiangdong, et al.. Influence and revising method of machine-ruling grating line′s curve error, location error on plane grating′ performance[J]. Chinese J Lasers, 2013, 40(3): 227-234.

[9] [9] Li Xiaotian, Bayanheshig, Qi Xiangdong, et al.. Two-dimensional fast Fourier transform method of analyzing the influence of plane grating′s line error and surface error on grating′s spectral performance[J]. Acta Optica Sinica, 2012, 32(11): 1105001.

[10] [10] Qi Naiming, Tao Jiasheng, Guan Yingzi, et al.. Research on aerostatic guideway error balance[J]. Journal of Harbin Institute of Technology, 1997, 29(1): 61-63.

[11] [11] Song Nan, Yao Xuefeng, Feng Shulong, et al.. Grind and detection of high-precision double V-type rail[J]. 2013, 34(2): 184-189.

[12] [12] Chi Feng, Zhu Yu, Zhang Zhiping, et al.. Environment compensation technologies in dual-frequency laser interferometer measurement system[J]. Chinese J Lasers, 2014, 41(4): 182-188.

[13] [13] Chen Kewei, Yu Hongzhu, Zhang Shanwen, et al.. Design of diamond carriage system for large diffraction grating ruling engine[J]. Optics and Precision Engineering, 2013, 21(11): 2900-2905.