Fig. 1. Schematic of femtosecond laser dual-mode fabrication system based on SLM

Fig. 2. SEM images of lattice microstructures obtained by superimposing blazed grating under focus control mode for different output powers. (a) 5 mW; (b) 10 mW; (c) 15 mW; (d) 20 mW

Fig. 3. SEM images of Rio Olympic emblem under focus control mode for different output powers. (a) 5 mW; (b) 10 mW; (c) 15 mW; (d) 20 mW

Fig. 4. Light fields obtained after load of holograms corresponding to different target patterns on SLM. (a)(b)(c) Single hologram; (d)(e)(f) 20 holograms

Fig. 5. SEM images of different structures obtained by superposition of 20 holograms under patterned exposure mode. (a) Solid prismatic; (b) hexagon; (c) hollow prismatic