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Chinese Journal of Lasers, Volume. 35, Issue s2, 351(2008)

MOEMS 3D Microstructure Preparation Method Based on Novel Localized Electrochemical Deposition

Ma Lihong1,2、*, Zhang Haijun1, Liu Chao1, and Zhang Dongxian1
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    Ma Lihong, Zhang Haijun, Liu Chao, Zhang Dongxian. MOEMS 3D Microstructure Preparation Method Based on Novel Localized Electrochemical Deposition[J]. Chinese Journal of Lasers, 2008, 35(s2): 351

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    Received: --

    Accepted: --

    Published Online: Jan. 5, 2009

    The Author Email: Lihong Ma (zjnumlh@tom.com)

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    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology