Fig. 1. Schematic diagram of the deformable mirror model

Fig. 2. Profile change curve of the deformable mirror, the approximate parabola and the deviation curve of the two when the air chamber pressure is 0.08 MPa (fused-silica mirror thickness h=0.5 mm, radius a=15 mm, E=76700 N/mm², μ=0.21; laser wavelength: 1030 nm)

Fig. 3. Physical map of the deformable mirror and the vacuum generator device

Fig. 4. Spatial distribution of spherical and aspherical parts of the surface shape of the deformable mirror. (a) Spherical surface shape at the air pressure 0; (b) aspherical surface shape at the air pressure 0; (c) spherical surface shape at the air pressure 0.08 MPa; (d) aspherical surface shape at the air pressure 0.08 MPa

Fig. 5. Deformable mirror parameter change with the gas pressure difference ranges from 0 to 0.08 MPa. (a) Optical power of spherical surface; (b) PV value of aspherical surface

Fig. 6. Schematic diagram of experimental resonant cavity and optical path. (a) Schematic diagram; (b) physical diagram

Fig. 7. Schematic diagram of the stable region of the disk changing with the radius of curvature of the deformable mirror

Fig. 8. Thin disk crystal parameter change when the rear mirror is a plane mirror. (a) Relationship between the laser spot size and disk optical power, and the beam spot profiles with different pump currents; (b) relationship between the output power and M² factor with the pump current

Fig. 9. Relationship between the laser spot size on the thin disk crystal and disk optical power when the rear mirror is a plane mirror and the beam spot profiles with different pump currents

Fig. 10. Thin disk crystal parameter change by using the deformable mirror to dynamically compensate. (a) Relationship between the laser spot size and disk optical power, and the beam spot profiles with different pump currents; (b) relationship between the output power and M² factor with the pump current