Fig. 1. Optical path of the segmented mirror co-phase detection system

Fig. 2. (a) Schematic of the mask plate; (b) alignment schematic of mask plate and segmented mirrors; (c) prism array

Fig. 3. Eleven diffraction template patterns. (a) -5λ/20; (b) -4λ/20; (c) -3λ/20; (d) -2λ/20; (e) -λ/20; (f) 0; (g) λ/20; (h) 2λ/20; (i) 3λ/20; (j) 4λ/20; (k) 5λ/20

Fig. 4. Contour maps of every template pattern in Fig. 3. (a) -5λ/20; (b) -4λ/20; (c) -3λ/20; (d) -2λ/20; (e) -λ/20; (f) 0; (g) λ/20; (h) 2λ/20; (i) 3λ/20; (j) 4λ/20; (k) 5λ/20

Fig. 5. (a) Phase plate; (b) double semicircle diffraction mask plate; (c) double semicircle diffraction mask plate with only one hole

Fig. 6. Diffraction patters corresponding to four phase differences with the wavelength of 635 nm. (a) 229 nm; (b) 458 nm; (c) 687 nm; (d) -1374 nm

Fig. 7. Diffraction patters corresponding to four phase differences with the wavelength of 650 nm. (a) 229 nm; (b) 458 nm; (c) 687 nm; (d) -1374 nm