Acta Optica Sinica, Volume. 32, Issue 8, 822004(2012)

Methods of Enhancing Uniformities of Output Beams from Beam Expanding Unit for Illumination System of Deep-Ultraviolet Lithography

Zhao Yang* and Gong Yan
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    Zhao Yang, Gong Yan. Methods of Enhancing Uniformities of Output Beams from Beam Expanding Unit for Illumination System of Deep-Ultraviolet Lithography[J]. Acta Optica Sinica, 2012, 32(8): 822004

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    Paper Information

    Category: Optical Design and Fabrication

    Received: Feb. 4, 2012

    Accepted: --

    Published Online: Jun. 19, 2012

    The Author Email: Zhao Yang (juventus-xx@126.com)

    DOI:10.3788/aos201232.0822004

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