High Power Laser and Particle Beams, Volume. 34, Issue 12, 125001(2022)
Effect of different nitrogen ion implantation parameters on surface charge accumulation and dissipation characteristics of polytetrafluoroethene
To suppress the surface charge accumulation and improve the surface pressure resistance of polytetrafluoroethene (PTFE), the plasma immersion ion implantation was carried out on the surface of PTFE by radio frequency (RF) generation nitrogen plasma. The modification effect of PTFE sample surface was realized by changing RF power, pulse width and pulse amplitude during injection. X-ray photoelectron spectroscopy, surface morphology, surface resistivity, surface potential attenuation characteristics, surface trap energy level and density distribution were measured before and after injection. The effects of different injection parameters on surface composition, surface charge accumulation and dissipation characteristics of PTFE samples were systematically studied. The results show that nitrogen ions can achieve surface modification mainly through their own kinetic energy, rather than introducing new components through chemical reaction. The kinetic energy and quantity of nitrogen ions are the main factors determining the surface modification effect. With the increase of RF source power, nitrogen utilization efficiency of RF source is improved, the saturation point of treatment effect increases from 20 cm3/min at 100 W RF power to 30 cm3/min at 400 W RF power. The corresponding surface resistivity decreases from the maximum value
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Youhui He, Hongbin Chen, Fei Li, Falun Song. Effect of different nitrogen ion implantation parameters on surface charge accumulation and dissipation characteristics of polytetrafluoroethene[J]. High Power Laser and Particle Beams, 2022, 34(12): 125001
Category: Pulsed Power Technology
Received: Aug. 1, 2022
Accepted: --
Published Online: Nov. 10, 2022
The Author Email: Song Falun (songfalun@caep.cn)