[1] [1] Gao Honggang, Cao Jianlin, Zhu Yong, et al.. The development and application of ulter-smooth surfaces［J］. Physics, 2000, 29(10): 610-614.

[2] [2] Cooke F, Brown N, Prochnow E. Annular lapping of precision optical flatware［J］. Opt Eng, 1976, 15(5)： 407-415.

[3] [3] A D Malyarenko. Influence of the temperature of the processing medium on the figuring accuracy and the throughput of the polishing of optical surfaces［J］. J Opt Technol, 2000, 67 (1): 72-75.

[4] [4] Ralph W Dietz, Jean M Bennett. Bowl feed technique for producing supersmooth optical surfaces［J］. Appl Opt, 1966, 5(5): 881-882.

[5] [5] Zhenxiang Shen, Bin Ma, Zhanshan Wang, et al.. Fabrication of flat and supersmooth surfaces with bowl-feed polishing process［C］. SPIE, 2007, 6722: 67220U.

[6] [6] H J Kim, H Y Kim, H D Jeong, et al.. Friction and thermal phenomena in chemical mechanical polishing［J］. J Materials Processing Technology, 2002, 130-131: 334-338.

[7] [7] Len Borucki, Leslie Charns, Ara Philipossian. Analysis of frictional heating of grooved and flat CMP polishing pads［J］. J Electrochemical Society, 2004, 151(12): G809-G813.

[8] [8] C J Evans, E Paul, D Dornfeld, et al.. Material removal mechanisms in lapping and polishing［J］. CIRP Annals-Manufacturing Technology, 2003, 52(2): 611-633.

[9] [9] Teng Lin, Zhang Guangliang, Ren Jingxin. Optical pitch polishing surface temperature distribution regulation［J］. Aviation Engineering & Maintenance, 1994, 2: 14-16.

[10] [10] Ioan D Marinescu, Eckart Uhlmann, Toshiro K Doi. Handbook of Lapping and Polishing［M］. Boca Raton: CRC Press, 2006. 370-396.

[11] [11] Ren Jingxin, Teng Lin, Shi Xingkuan, et al.. Applied forces influence on optical glass surface quality［J］. Aviation Precision Manufacturing Technology, 1997, 33(2): 1-4.

[12] [12] Gao Honggang, Chen Bin, Cao Jianlin. Fabricating technology for supersmooth surfaces［J］. Optics And Precision Engineering, 1995, 3(4): 7-14.

[13] [13] Kong Xiangqian. Finite Element Method Used in Heat Transfer Theory (The Third Edition)[M]. Beijing: China Science Press, 1998.

[14] [14] Chen Huiquan, Mao Limin. Calculation and verification of an universal water surface evaporation coefficient formula［J］. Advances in Water Science, 1995, 6(2): 116-120.