Laser & Optoelectronics Progress, Volume. 58, Issue 7, 0712001(2021)

Vibration Measurement Method Based on Laser Self-Mixing Frequency Modulation Characteristics

Pufu Yin, Tengfei Wu*, and Xiaobo Chai
Author Affiliations
  • State Key Laboratory of Precision Measuring Technology & Instruments, School of Precision Instruments and Optoelectronics Engineering, Tianjin University, Tianjin 300072, China
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    Figures & Tables(9)
    Schematic diagram of self-mixing interference
    Self-mixing vibration measuring system
    Simulation results of reconstruction. (a) Unwrapped phase of AM signal; (b) unwrapped phase of FM signal; (c) reconstructed vibration curve; (d) error of reconstruction
    Simulated measurement range
    Reconstruction errors at different optical feedback levels
    Experimental equipment
    Experimental results of reconstruction. (a) AM signal; (b) FM signal; (c) unwrapped phase of AM signal; (d) unwrapped phase of FM signal; (e) reconstructed vibration curve
    Vibration repeated measurement results
    • Table 1. Measurement results

      View table

      Table 1. Measurement results

      Driving voltage amplitude /mVReconstructed amplitude /nmMeanvalue /nmStandard deviation /nm
      12345678
      2001616.51611.91622.71621.61627.01634.91622.61614.91621.57.3
      3002496.72505.02495.02492.92493.72500.52491.32494.12496.24.5
      4003297.63297.93298.43298.53295.53299.23296.53294.43297.31.7
      5004092.24103.54094.54090.24100.54088.34091.14090.44093.85.4
      6005021.35023.45023.25020.35018.65020.45017.65010.55019.44.1
      7005827.15841.45828.55833.85822.25841.25839.85829.45832.97.3
      8006644.76677.76661.96641.26657.56665.26637.66672.16657.214.8
      9007516.17518.17494.07504.17517.17498.27512.07501.27507.69.4
      10008335.68351.18356.28342.38365.48335.28335.38356.18347.211.7
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    Pufu Yin, Tengfei Wu, Xiaobo Chai. Vibration Measurement Method Based on Laser Self-Mixing Frequency Modulation Characteristics[J]. Laser & Optoelectronics Progress, 2021, 58(7): 0712001

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    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: Jul. 6, 2020

    Accepted: Sep. 3, 2020

    Published Online: Apr. 25, 2021

    The Author Email: Tengfei Wu (wtf@tju.edu.cn)

    DOI:10.3788/LOP202158.0712001

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