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Chinese Journal of Lasers, Volume. 32, Issue 6, 852(2005)

Error Analysis of Frequency Mixing for Heterodyne Interferometer

[in Chinese]*, [in Chinese], and [in Chinese]
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    [1] [1] N. Bobroff. Residual errors in laser interferometry from air turbulence and nonlinearity [J]. Appl. Opt., 1987, 26(13): 2676～2682

    [2] [2] Wenmei Hou, Gunter Wilkening. Investigation and compensation of the nonlinearity of heterodyne interferometers [J]. Precision Engineering, 1992, 14(2): 91～98

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    [3] Lin Haoshan, Chen Juke, Li Yuhe, Li Qingxiang, Pan Fudong, Wang Lihu. Error Analysis of Optical Frequency Mixing on Detecting Device for Superfinish Surface Scratch[J]. Laser & Optoelectronics Progress, 2015, 52(2): 21203

    [4] Li Liyan, Yuan Yonggui, Wu Bing, Liu Binbin, Yang Jun, Yuan Libo. Effect of Wave Plate on Nonlinear Error in Single-Frequency Polarized Laser Interferometer[J]. Acta Optica Sinica, 2011, 31(1): 112009

    [5] Deng Yuanlong, Li Xuejin, Chai Jinlong, Xu Gang. Nonlinear Error Introduced by Beam Splitters in an Interferometric Ellipsometer[J]. Chinese Journal of Lasers, 2008, 35(s2): 137

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    [in Chinese], [in Chinese], [in Chinese]. Error Analysis of Frequency Mixing for Heterodyne Interferometer[J]. Chinese Journal of Lasers, 2005, 32(6): 852

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    Paper Information

    Category: measurement and metrology

    Received: Jun. 10, 2004

    Accepted: --

    Published Online: Jun. 6, 2006

    The Author Email: (neojiang@sina.com.cn)

    DOI:

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology