[2] [2] TAKAI T,IWAMOTO H,TAKAMINE Y,et al.High performance SAW resonator on new multi-layered substrate using LiTaO3 crystal［J］. IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control,2017,64(9):1382-1389.

[3] [3] KIMURA T, OMURA M,KISHIMOTO Y,et al.Comparative study of acoustic wave devices using thin piezoelectric plates in the 3-5 GHz gange［J］. Microwave Theory and Techniques IEEE Transactions on, 2019, 67(3):915-921.

[4] [4] KIMURA T,DAIMON K,OGAMI T,et al.S0 mode Lamb wave resonators using LiNbO3 thin plate on acoustic multilayer reflector［J］.Jpn J Appl Phys,2013,52(7):1044-1055.

[5] [5] KIMURA T,KISHIMOTO Y,OMURA M,et al.3.5 GHz longitudinal leaky surface acoustic wave resonator using a multilayered waveguide structure for high acoustic energy confinement［J］. Jpn J Appl Phys, 2018,57(Suppl.1):07LD15.

[6] [6] TAKAI T,IWAMOTO H,TAKAMINE Y,et al.High-performance SAW resonator with simplified LiTaO3/SiO2 double layer structure on Si substrate［J］. IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control, 2019, 66(5):1006-1013.

[7] [7] KHELIF A,CHOUJAA A,BENCHABANE S,et al.Omnidirectional band gap mirror for surface acoustic wave［C］//Springer, Dordrecht:IUTAM Symposium on Recent Advances of Acoustic Waves in Solids,2010:187-192.

[10] [10] SIDDIQI M,LEE E Y.AlN-on-Si MEMS resonator bounded by wide acoustic bandgap two-dimensional phononic crystal anchors［C］//［S.l.］:IEEE International Conference on Micro Electro Mechanical Systems(MEMS). IEEE,2018:727-730.

[11] [11] TONG Y J,HAN T.Anchor loss reduction of lamb wave resonator by pillar-based phononic crystal［J］.Micromachines,2021,12(1):62.

[12] [12] RICHARDSON M,CHEEMALAPATI S,EVERLY R,et al.Design and fabrication of a SAW device with Ta filled microcavities inserted into its delay path for improved power transfer［J］. Journal of Vacuum Science and Technology B,2015,33(2):022001(8).

[13] [13] GAO A,ZOU J,WU T.Narrowband impedance transformer with extremely high transformation ratio of 200［J］. IEEE Electron Device Letters,2019,40(11):1820-1823.

[14] [14] AKIYAMA M,KAMOHARA T,KANO K,et al. Enhancement of piezoelectric response in scandium aluminum nitride alloy thin films prepared by dual reactive cosputtering［J］. Advanced Materials,2009,21(5):593-596.

[15] [15] SUZUKI M,GOMI M,KAKIO S.Propagation characteristics of longitudinal-type leaky surface acoustic wave on layered structure consisting of ScxAl1-xN film/LiNbO3 substrate［J］.Jpn J Appl Phys,2018,57(Suppl.1):07LD06.

[16] [16] SUZUKI M,SAWADA N,KAKIO S.Analysis of longitudinal leaky surface acoustic wave propagation characteristics on a piezoelectric ScAlN layer/sapphire or quartz substrate［J］.Jpn J Appl Phys,2019,58(SG):SGGC08.

[17] [17] SUZUKI M,KAKIO S.Analysis of leaky surface acoustic wave characteristics propagating on high piezoelectric ScAlN film/high velocity quartz substrate［J］. Jpn J Appl Phys,2020,59(SK): SKKC07.

[18] [18] PASTUREAU L F,AMARA S,CALIENDO C,et al. High quality and low loss surface acoustic wave SAW resonator based on chromium-doped AlN on sapphire［J］. Applied Physics A,2021,127(4):1-11.

[19] [19] LIU H L, ZHANG Q,ZHAO X,et al.Highly coupled leaky surface acoustic wave on hetero acoustic layer structures based on ScAlN thin films with a c-axis tilt angle［J］. Jpn J Appl Phys,2021,60(3):031002.

[20] [20] POBERAJ G,HU H,SOHLER W,et al. Lithium niobate on insulator (LNOI) for micro-photonic devices［J］.Laser & Photonics Reviews,2012,6(4):488-503.

[21] [21] GUO Pengjun,ZHANG Jingzhou,YANG Yuanfan,et al.Study on wireless communication network architecture and access control algorithm in aircraft［J］.Computer Science,2022,49(9):268-274.

[22] [22] KADOTA M,Y ISHII,TANAKA S.Ultra-wideband T- and π-type ladder filters using a fundamental shear horizontal mode plate wave in a LiNbO3 plate［J］.Jpn J Appl Phys,2019,58(SG):SGGC10(4).