Journal of Infrared and Millimeter Waves, Volume. 41, Issue 2, 413(2022)

The passivation effects of CdTe deposited by MBE in MW HgCdTe photodiodes

Xiao-Hui XIE*, Chun LIN, Lu CHEN, Yu ZHAO, Jing ZHANG, and Li HE
Author Affiliations
  • Shanghai Institute of Technical Physics,Chinese Academy of Sciences,Shanghai 200083,China
  • show less
    Figures & Tables(6)
    Flow-process diagram of HgCdTe photodiodes passivated by the CdTe in-suit
    Topography images of CdTe or HgCdTe using laser scanning confocal microscopy(a)CdTe deposited by MBE,(b)HgCdTe after etching CdTe in-suit, and(c)HgCdTe after etching top layer HgCdTe
    AFM topography images of CdTe or HgCdTe(a)CdTe deposited by MBE,(b)HgCdTe after etching CdTe in-suit, and(c)CdTe deposited by E-beam evaporation
    SEM top view images of CdTe or HgCdTe surface
    Cross-sectional SEM images of the CdTe and HgCdTe interface(a)cross-sectional images of CdTe deposited by MBE, and(b)cross-sectional images of CdTe deposited by E-beam evaporation
    I-V and R-V characteristics of HgCdTe photodiodes with different passivation layers(a)photodiodes passivated by CdTe in-suit,(b)photodiodes passivated by CdTe/ZnS,(c)photodiodes passivated by CdTe in-suit with annealing after implant, and(d)photodiodes passivated by CdTe/ZnS with annealing after implant
    Tools

    Get Citation

    Copy Citation Text

    Xiao-Hui XIE, Chun LIN, Lu CHEN, Yu ZHAO, Jing ZHANG, Li HE. The passivation effects of CdTe deposited by MBE in MW HgCdTe photodiodes[J]. Journal of Infrared and Millimeter Waves, 2022, 41(2): 413

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Category: Research Articles

    Received: May. 27, 2021

    Accepted: --

    Published Online: Jul. 8, 2022

    The Author Email: Xiao-Hui XIE (xiexiaohui@mail.sitp.ac.cn)

    DOI:10.11972/j.issn.1001-9014.2022.02.005

    Topics