Photonics Research, Volume. 13, Issue 2, 477(2025)

Silicon-integrated scandium-doped aluminum nitride electro-optic modulator

Tianqi Xu1, Yushuai Liu2,3,4, Yuanmao Pu1, Yongxiang Yang1, Qize Zhong1,5, Xingyan Zhao1, Yang Qiu1, Yuan Dong1, Tao Wu2,3,4, Shaonan Zheng1,6, and Ting Hu1,5、*
Author Affiliations
  • 1School of Microelectronics, Shanghai University, Shanghai 201800, China
  • 2School of Information Science and Technology, ShanghaiTech University, Shanghai 201210, China
  • 3Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China
  • 4University of Chinese Academy of Sciences, Beijing 100049, China
  • 5Shanghai Key Laboratory of Chips and Systems for Intelligent Connected Vehicle, Shanghai 200444, China
  • 6e-mail: snzheng@shu.edu.cn
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    References(65)

    [22] S. Zhu, Q. Zhong, N. Li. Integrated ScAlN photonic circuits on silicon substrate. Conference on Lasers and Electro-Optics (CLEO)(2020).

    [27] M. Ghatge, V. Felmetsger, R. Tabrizian. High kt2 ·Q waveguide-based ScAlN-on-Si UHF and SHF resonators. IEEE International Frequency Control Symposium (IFCS), 1-4(2018).

    [50] A. B. Posadas, V. E. Stenger, J. DeFouw. Electro-optic barium titanate modulators on silicon photonics platform. IEEE Silicon Photonics Conference (SiPhotonics), 1-2(2023).

    [51] S. M. Sze, Y. Li, K. K. Ng. Physics of Semiconductor Devices(2021).

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    Tianqi Xu, Yushuai Liu, Yuanmao Pu, Yongxiang Yang, Qize Zhong, Xingyan Zhao, Yang Qiu, Yuan Dong, Tao Wu, Shaonan Zheng, Ting Hu, "Silicon-integrated scandium-doped aluminum nitride electro-optic modulator," Photonics Res. 13, 477 (2025)

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    Paper Information

    Category: Integrated Optics

    Received: Aug. 12, 2024

    Accepted: Nov. 30, 2024

    Published Online: Feb. 10, 2025

    The Author Email: Ting Hu (hu-t@shu.edu.cn)

    DOI:10.1364/PRJ.539211

    CSTR:32188.14.PRJ.539211

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