In order to solve the problem of laser ablation due to the long time laser stop at the single point caused by the excessive density of the data point set in laser galvanometer processing, the original data point set was processed by thinning, curve point set segmentation, and triangular dichotomy Bezier curve fitting data processing, which was converted into an entity composed of a few line and curve. When laser marking, the curve was adaptively interpolated according to the output resolution and curve curvature to solve the problem of too dense or too sparse data points caused by different magnification. By marking the original and processed data with different marking magnification, the results show that the fitted data eliminates the laser ablation phenomenon caused by over-density of the data under the guaranteed 2μm accuracy of the original data. It also has a smoother marking effect at high magnification, as well as a higher marking efficiency and quality. It provides a reference for high density laser processing and has a good application prospect in the field of high quality laser processing such as laser precision etching.