Acta Optica Sinica, Volume. 25, Issue 9, 1293(2005)
Effect of N2 Mass Flow Rate On the Optical Property of Titanium Nitride Films Deposited by Magnetron Sputtering
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[in Chinese], [in Chinese]. Effect of N2 Mass Flow Rate On the Optical Property of Titanium Nitride Films Deposited by Magnetron Sputtering[J]. Acta Optica Sinica, 2005, 25(9): 1293
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