Chinese Optics, Volume. 18, Issue 2, 237(2025)
CGH null compensation testing of high-order coaxial aspherical surfaces
Figures & Tables(15)
Fig. 9. Optical path diagram of primary mirror CGH compensation testing
Fig. 10. The detection results of the coaxial high-order aspherical primary mirror surface
Table 1. Basic parameters of the high-order aspherical mirror
View tableView in ArticleTable 1. Basic parameters of the high-order aspherical mirror
参数项 参数数值 D/mm 260 r −4.62×102 k 1.192×10−1 A4 2.936×10−11 A6 2.875×10−15
Table 2. Basic parameters of the detection optical path
View tableView in ArticleTable 2. Basic parameters of the detection optical path
参数 数值 CGH基板 直径为100 mm； 厚度为15.07 mm； 距离L1= 93.76； L2= 496 mm 干涉仪焦点坐标 F(0, −4)，单位mm 光阑参数 距离CGH后表面76.5 mm；直径1 mm 辅助对准区域(蓝色) 辅助CGH和干涉仪之间对准；辅助CGH和 平面镜直接对准；衍射级次5级 基准投射区域(紫色) 在被检面处投射参考光斑；衍射级次1级 所投射4个光斑坐标 J(0, 132.14), Q(132.14, 0), K(0, -132.14), A(−132.14, 0)，单位mm
Table 3. Optical design results of main area
View tableView in ArticleTable 3. Optical design results of main area
参数 数值 区域范围 半径为25.07 mm的圆 检测范围/mm 260 条纹密度估算/(lp·mm−1) 平均值为76，最密处为117.5 干涉仪焦点坐标 F(0, −4)，单位mm Zernike拟合残差 rms0.0000λ@632.8 nm
Table 4. CGH error sources of the primary mirror
View tableView in ArticleTable 4. CGH error sources of the primary mirror
误差项 数值(rms/λ) 备注 设计误差 0.00000 编码误差 0.00010 基板误差 0.0027 假定补偿其Z9及以下低阶项 刻划误差 0.0023 按位置误差σx=σy=30 nm 位置失调误差 0 检测时调整彗差到零 误差合成 0.00355 以RSS方式合成上述各项
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Shen WANG, Quan LIU, Cheng-li GUO, Li-song YAN. CGH null compensation testing of high-order coaxial aspherical surfaces[J]. Chinese Optics, 2025, 18(2): 237
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Received: Sep. 23, 2024
Accepted: Nov. 25, 2024
Published Online: May. 19, 2025
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