Journal of Synthetic Crystals, Volume. 52, Issue 5, 783(2023)
Study on Molecular Beam Epitaxy of High Al Content AlGaN Thin Films and Si Doping
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LIANG Xiao, LI Siqi, WANG Zhongwei, SHAO Pengfei, CHEN Songlin, TAO Tao, XIE Zili, LIU Bin, CHEN Dunjun, ZHENG Youdou, ZHANG Rong, WANG Ke. Study on Molecular Beam Epitaxy of High Al Content AlGaN Thin Films and Si Doping[J]. Journal of Synthetic Crystals, 2023, 52(5): 783
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Received: Mar. 13, 2023
Accepted: --
Published Online: Jun. 11, 2023
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CSTR:32186.14.
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