[1] [1] DANG C Q, CHOU J P, DAI B, et al. Achieving large uniform tensile elasticity in microfabricated diamond[J]. Science, 2021, 371(6524): 76-78.

[2] [2] ANAYA J, BAI T, WANG Y, et al. Simultaneous determination of the lattice thermal conductivity and grain/grain thermal resistance in polycrystalline diamond[J]. Acta Materialia, 2017, 139: 215-225.

[3] [3] ZHAO Y H, YUE W, LIN F, et al. Friction and wear behaviors of polycrystalline diamond under vacuum conditions[J]. International Journal of Refractory Metals and Hard Materials, 2015, 50: 43-52.

[4] [4] MAY P W. Diamond thin films: a 21 st-century material[J]. Philosophical Transactions of the Royal Society of London Series A: Mathematical, Physical and Engineering Sciences, 2000, 358(1766): 473-495.

[5] [5] YAMASAKI S, GHEERAERT E, KOIDE Y. Doping and interface of homoepitaxial diamond for electronic applications[J]. MRS Bulletin, 2014, 39(6): 499-503.

[6] [6] ZHANG Z F, LIN C N, YANG X, et al. Solar-blind imaging based on 2-inch polycrystalline diamond photodetector linear array[J]. Carbon, 2021, 173: 427-432.

[7] [7] NEMANICH R J, CARLISLE J A, HIRATA A, et al. CVD diamond—research, applications, and challenges[J]. MRS Bulletin, 2014, 39(6): 490-494.

[8] [8] ZHENG Y T, LI C M, LIU J L, et al. Diamond with nitrogen: states, control, and applications[J]. Functional Diamond, 2021, 1(1): 63-82.

[9] [9] ZHONG Y, BAO S C, HE Y M, et al. Heterogeneous integration of diamond-on-chip-on-glass interposer for efficient thermal management[J]. IEEE Electron Device Letters, 2024, 45(3): 448-451.

[10] [10] UMMETHALA S, RATH P, LEWES-MALANDRAKIS G, et al. High-Q optomechanical circuits made from polished nanocrystalline diamond thin films[J]. Diamond and Related Materials, 2014, 44: 49-53.

[11] [11] LUO H, AJMAL K M, LIU W, et al. Polishing and planarization of single crystal diamonds: state-of-the-art and perspectives[J]. International Journal of Extreme Manufacturing, 2021, 3(2): 022003.

[12] [12] ZHANG H C, YAN Z Y, SONG Z P, et al. The polishing methods for large area CVD diamond wafer[J]. Functional Diamond, 2023, 3(1): 2246495.

[13] [13] DORONIN M A, POLYAKOV S N, KRAVCHUK K S, et al. Limits of single crystal diamond surface mechanical polishing[J]. Diamond and Related Materials, 2018, 87: 149-155.

[16] [16] ZHENG Y T, YE H T, THORNTON R, et al. Subsurface cleavage of diamond after high-speed three-dimensional dynamic friction polishing[J]. Diamond and Related Materials, 2020, 101: 107600.

[18] [18] ZHANG H C, YAN Z Y, ZHANG H X, et al. Polycrystalline CVD diamond wafer polished by molten iron erosion[J]. Diamond and Related Materials, 2024, 142: 110734.

[19] [19] PASTEWKA L, MOSER S, GUMBSCH P, et al. Anisotropic mechanical amorphization drives wear in diamond[J]. Nature Materials, 2011, 10(1): 34-38.

[20] [20] GOGOTSI Y G, KAILER A, NICKEL K G. Transformation of diamond to graphite[J]. Nature, 1999, 401: 663-664.

[21] [21] ZONG W J, CHENG X, ZHANG J J. Atomistic origins of material removal rate anisotropy in mechanical polishing of diamond crystal[J]. Carbon, 2016, 99: 186-194.

[22] [22] LU Y X, WANG B, MU Q, et al. Nanoscale smooth and damage-free polycrystalline diamond surface ground by coarse diamond grinding wheel[J]. Diamond and Related Materials, 2022, 125: 108971.

[23] [23] NGUYEN V T, FANG T H. Phase transformation and subsurface damage formation in the ultrafine machining process of a diamond substrate through atomistic simulation[J]. Scientific Reports, 2021, 11(1): 17795.

[24] [24] OSSWALD S, YUSHIN G, MOCHALIN V, et al. Control of sp2/sp3 carbon ratio and surface chemistry of nanodiamond powders by selective oxidation in air[J]. Journal of the American Chemical Society, 2006, 128(35): 11635-11642.

[26] [26] FERRARI A C, ROBERTSON J. Interpretation of Raman spectra of disordered and amorphous carbon[J]. Physical Review B, 2000, 61(20): 14095-14107.