Laser Technology, Volume. 45, Issue 2, 131(2021)
Fabrication of glass microlens arrays by laser-based technology
In order to realize the controllable fabrication of sapphire microlens array templates, an etching-assisted laser machining technology was used, a compact sapphire concave microlens array template with controllable morphology and uniform arrangement was obtained. And by combining with the high-temperature casting transfer technology, the rapid preparation of K9 glass convex microlens array was realized; based on the large difference in thermal expansion coefficients between sapphire and glass, the separation of the sapphire template and the glass microlens array plate was realized. The results indicate that the surface roughness of the transferred glass microlens arrays is approximately 2nm, meanwhile, it exhibits high transmittance of up to 80% and shows clear focusing and imaging properties for light of different wavelengths in the visible range. In addition, the sapphire template can be reused with HF solution cleaned. Etching-assisted laser processing combined with high temperature casting transcribing technology can realize the rapid preparation of highly smooth glass microlens array. This technique provides a reference for the rapid preparation of micro-nano-devices with hard materials.
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LI Qiankun, LIU Xueqing, CHENG Rong. Fabrication of glass microlens arrays by laser-based technology[J]. Laser Technology, 2021, 45(2): 131
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Received: Jun. 8, 2020
Accepted: --
Published Online: Apr. 15, 2021
The Author Email: CHENG Rong (chengr@tinghua.edu.cn)